dc.creator | Barranco Quero, Ángel | es |
dc.creator | Holgado Vázquez, Juan Pedro | es |
dc.creator | Yubero Valencia, Francisco | es |
dc.creator | Espinós Manzorro, Juan Pedro | es |
dc.creator | Martín, Ana I. | es |
dc.creator | Rodríguez González-Elipe, Agustín | es |
dc.date.accessioned | 2017-08-01T11:40:00Z | |
dc.date.available | 2017-08-01T11:40:00Z | |
dc.date.issued | 2001-05 | |
dc.identifier.citation | Barranco Quero, Á., Holgado Vázquez, J.P., Yubero Valencia, F., Espinós, J.P., Martín, A.I. y Rodríguez González-Elipe, A. (2001). Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment. Journal of Vacuum Science and Technology A, 19 (3), 1024-1026. | |
dc.identifier.issn | 0734-2101 | es |
dc.identifier.uri | http://hdl.handle.net/11441/63460 | |
dc.description.abstract | N2+ bombardment of Al2O3 has been investigated by near edge x-ray absorption fine structure spectroscopy. Two kinds of species were detected and were attributed to implanted nitrogen atoms and nitride species. These results are discussed in relation to previous attributions in the literature of these species to AlNO and AlN. | es |
dc.description.sponsorship | Comisión Interministerial de Ciencia y Tecnología (CICYT) MAT97-0689 | es |
dc.format | application/pdf | es |
dc.language.iso | eng | es |
dc.publisher | AVS Science and Technology Society | es |
dc.relation.ispartof | Journal of Vacuum Science and Technology A, 19 (3), 1024-1026. | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.title | Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment | es |
dc.type | info:eu-repo/semantics/article | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/publishedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Química Inorgánica | es |
dc.relation.projectID | MAT97-0689 | es |
dc.relation.publisherversion | http://dx.doi.org/10.1116/1.1355762 | es |
dc.identifier.doi | 10.1116/1.1355762 | es |
idus.format.extent | 3 p. | es |
dc.journaltitle | Journal of Vacuum Science and Technology A | es |
dc.publication.volumen | 19 | es |
dc.publication.issue | 3 | es |
dc.publication.initialPage | 1024 | es |
dc.publication.endPage | 1026 | es |
dc.contributor.funder | Comisión Interministerial de Ciencia y Tecnología (CICYT). España | |