dc.creator | Barranco Quero, Ángel | |
dc.creator | Jiménez Marín, Alfonso | |
dc.creator | Frutos Rayego, Fabián | |
dc.creator | Cotrino Bautista, José | |
dc.creator | Yubero Valencia, Francisco | |
dc.creator | Espinós Manzorro, Juan Pedro | |
dc.creator | González Elipe, Agustín Rodríguez | |
dc.date.accessioned | 2016-02-08T11:41:04Z | |
dc.date.available | 2016-02-08T11:41:04Z | |
dc.date.issued | 2001 | |
dc.identifier.citation | Barranco, A., Jiménez Marín, A., Frutos Rayego, F., Cotrino Bautista, J., Yubero Valencia, F., Espinós Manzorro, J.P. y González Elipe, A.R. (2001). Dielectric breakdown of SiO2 thin films deposited by ion beam induced and plasma enhanced CVD. IEEE. | |
dc.identifier.isbn | 0-7803-6352-3 | es |
dc.identifier.uri | http://hdl.handle.net/11441/34293 | |
dc.format | application/pdf | es |
dc.language.iso | eng | es |
dc.publisher | IEEE | es |
dc.relation.ispartof | 2001 IEEE 7th International Conference on Solid Dielectrics, 303-306, June 25-29,2001, Eindhoven, the Netherlands | es |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.title | Dielectric breakdown of SiO2 thin films deposited by ion beam induced and plasma enhanced CVD | es |
dc.type | info:eu-repo/semantics/conferenceObject | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/publishedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Física Aplicada I | es |
dc.relation.publisherversion | http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=955633 | es |
dc.identifier.doi | http://dx.doi.org/10.1109/ICSD.2001.955633 | es |
dc.identifier.idus | https://idus.us.es/xmlui/handle/11441/34293 | |