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Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment

dc.creatorBarranco Quero, Ángeles
dc.creatorHolgado Vázquez, Juan Pedroes
dc.creatorYubero Valencia, Franciscoes
dc.creatorEspinós Manzorro, Juan Pedroes
dc.creatorMartín, Ana I.es
dc.creatorRodríguez González-Elipe, Agustínes
dc.date.accessioned2017-08-01T11:40:00Z
dc.date.available2017-08-01T11:40:00Z
dc.date.issued2001-05
dc.identifier.citationBarranco Quero, Á., Holgado Vázquez, J.P., Yubero Valencia, F., Espinós, J.P., Martín, A.I. y Rodríguez González-Elipe, A. (2001). Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment. Journal of Vacuum Science and Technology A, 19 (3), 1024-1026.
dc.identifier.issn0734-2101es
dc.identifier.urihttp://hdl.handle.net/11441/63460
dc.description.abstractN2+ bombardment of Al2O3 has been investigated by near edge x-ray absorption fine structure spectroscopy. Two kinds of species were detected and were attributed to implanted nitrogen atoms and nitride species. These results are discussed in relation to previous attributions in the literature of these species to AlNO and AlN.es
dc.description.sponsorshipComisión Interministerial de Ciencia y Tecnología (CICYT) MAT97-0689es
dc.formatapplication/pdfes
dc.language.isoenges
dc.publisherAVS Science and Technology Societyes
dc.relation.ispartofJournal of Vacuum Science and Technology A, 19 (3), 1024-1026.
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 Internacional*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.titleNear edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardmentes
dc.typeinfo:eu-repo/semantics/articlees
dcterms.identifierhttps://ror.org/03yxnpp24
dc.type.versioninfo:eu-repo/semantics/publishedVersiones
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.contributor.affiliationUniversidad de Sevilla. Departamento de Química Inorgánicaes
dc.relation.projectIDMAT97-0689es
dc.relation.publisherversionhttp://dx.doi.org/10.1116/1.1355762es
dc.identifier.doi10.1116/1.1355762es
idus.format.extent3 p.es
dc.journaltitleJournal of Vacuum Science and Technology Aes
dc.publication.volumen19es
dc.publication.issue3es
dc.publication.initialPage1024es
dc.publication.endPage1026es
dc.contributor.funderComisión Interministerial de Ciencia y Tecnología (CICYT). España

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