Artículo
Nanostructured Ti thin films by magnetron sputtering at oblique angles
Autor/es | Álvarez Molina, Rafael
García-Martín, José Miguel García-Valenzuela, Aurelio Macías Montero, Manuel Jesús Ferrer Fernández, Francisco Javier Santiso, José Cotrino Bautista, José Rico-Gavira, Víctor Joaquín Rodríguez González-Elipe, Agustín Palmero Acebedo, Alberto |
Departamento | Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear |
Fecha de publicación | 2016 |
Fecha de depósito | 2019-03-05 |
Publicado en |
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Resumen | The growth of Ti thin films by the magnetron sputtering technique at oblique angles and at room temperature is analysed from both experimental and theoretical points of view. Unlike other materials deposited in similar ... The growth of Ti thin films by the magnetron sputtering technique at oblique angles and at room temperature is analysed from both experimental and theoretical points of view. Unlike other materials deposited in similar conditions, the nanostructure development of the Ti layers exhibits an anomalous behaviour when varying both the angle of incidence of the deposition flux and the deposition pressure. At low pressures, a sharp transition from compact to isolated, vertically aligned, nanocolumns is obtained when the angle of incidence surpasses a critical threshold. Remarkably, this transition also occurs when solely increasing the deposition pressure under certain conditions. By the characterization of the Ti layers, the realization of fundamental experiments and the use of a simple growth model, we demonstrate that surface mobilization processes associated to a highly directed momentum distribution and the relatively high kinetic energy of sputtered atoms are responsible for this behaviour |
Agencias financiadoras | Junta de Andalucía Ministerio de Ciencia e Innovación (MICIN). España |
Identificador del proyecto | P12-FQM- 2265
CSD2008- 00023 MAT2013-42900-P MAT2013-40852-R MAT2014-59772-C2-1 MAT2011- 29081 |
Cita | Álvarez Molina, R., García-Martín, J.M., García Valenzuela, A., Macías Montero, M.J., Ferrer Fernández, F.J., Santiso, J.,...,Palmero Acebedo, A. (2016). Nanostructured Ti thin films by magnetron sputtering at oblique angles. Journal of Physics D: Applied Physics, 49 (4), 045303-. |
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Nanostructured Ti thin films.pdf | 1.350Mb | [PDF] | Ver/ | |