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Iron oxide thin films prepared by ion beam induced chemical vapor deposition: Structural characterization by infrared spectroscopy

 

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Author: Yubero Valencia, Francisco
Ocaña, Manuel
Justo, Ángel
Contreras Buceta, Leopoldo
Rodríguez González-Elipe, Agustín
Department: Universidad de Sevilla. Departamento de Química Inorgánica
Date: 2000
Published in: Journal of Vacuum Science and Technology A, 18 (5), 2244-2248.
Document type: Article
Abstract: Iron oxide thin films as hematite (α-Fe2O3) have been prepared by ion beam induced chemical vapor deposition. Very compact and dense films are obtained by this procedure. The thin films have been grown by ombardment of the substrate surfaces with O2...
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Cite: Yubero Valencia, F., Ocaña, M., Justo, Á., Contreras Buceta, L. y Rodríguez González-Elipe, A. (2000). Iron oxide thin films prepared by ion beam induced chemical vapor deposition: Structural characterization by infrared spectroscopy. Journal of Vacuum Science and Technology A, 18 (5), 2244-2248.
Size: 290.4Kb
Format: PDF

URI: http://hdl.handle.net/11441/63457

DOI: 10.1116/1.1286198

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