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Iron oxide thin films prepared by ion beam induced chemical vapor deposition: Structural characterization by infrared spectroscopy

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Autor: Yubero Valencia, Francisco
Ocaña, Manuel
Justo, Ángel
Contreras Buceta, Leopoldo
Rodríguez González-Elipe, Agustín
Departamento: Universidad de Sevilla. Departamento de Química Inorgánica
Fecha: 2000
Publicado en: Journal of Vacuum Science and Technology A, 18 (5), 2244-2248.
Tipo de documento: Artículo
Resumen: Iron oxide thin films as hematite (α-Fe2O3) have been prepared by ion beam induced chemical vapor deposition. Very compact and dense films are obtained by this procedure. The thin films have been grown by ombardment of the substrate surfaces with O2+ ions or mixtures of O2+ and Ar+ ions, while a volatile precursor of iron [i.e., Fe(CO)5] is dosed onto the substrate surface. In the latter case, Ar atoms are incorporated within the iron oxide lattice. Atomic force microscopy, Rutherford backscattering spectroscopy, and x-ray photoelectron spectroscopy were utilized to characterize the films’ surface morphology, stoichiometry and chemical state. The film structure has been analyzed by grazing angle x-ray diffraction (XRD) and infrared spectroscopies. In particular, infrared spectroscopy has permitted a thorough structural characterization of the films, even in the cases where XRD does not provide information about the structure. Thus, when O2 1 ions are used for the synthesis, iron oxide...
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Cita: Yubero Valencia, F., Ocaña, M., Justo, Á., Contreras Buceta, L. y Rodríguez González-Elipe, A. (2000). Iron oxide thin films prepared by ion beam induced chemical vapor deposition: Structural characterization by infrared spectroscopy. Journal of Vacuum Science and Technology A, 18 (5), 2244-2248.
Tamaño: 290.4Kb
Formato: PDF

URI: http://hdl.handle.net/11441/63457

DOI: 10.1116/1.1286198

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