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Influence of the angular distribution function of incident particles on the microstructure and anomalous scaling behavior of thin films
dc.creator | Cotrino Bautista, José | es |
dc.creator | Yanguas Gil, Alejandro | es |
dc.creator | Barranco Quero, Ángel | es |
dc.creator | Rodríguez González-Elipe, Agustín | es |
dc.date.accessioned | 2017-07-18T14:37:33Z | |
dc.date.available | 2017-07-18T14:37:33Z | |
dc.date.issued | 2006-06-26 | |
dc.identifier.citation | Cotrino Bautista, J., Yanguas Gil, A., Barranco, A. y González Elipe, A.R. (2006). Influence of the angular distribution function of incident particles on the microstructure and anomalous scaling behavior of thin films. Physical Review Letters, 96 (23), 236101-1-236101-4. | |
dc.identifier.issn | 0031-9007 (impreso) | es |
dc.identifier.issn | 1079-7114 (electrónico) | es |
dc.identifier.uri | http://hdl.handle.net/11441/62632 | |
dc.description.abstract | The microstructure and the scaling properties of films grown by plasma enhanced chemical vapor deposition are reproduced with a discrete model that takes into account the angular distribution function of the particles and the lateral growth of the films. Both the experimental and simulated surfaces exhibit a granular microstructure and an anomalous scaling behavior characterized by values of the growth exponent β that vary with the scale of measurement. Depending on the angular distribution function used in the model, values of β ranging from 0.86 to 0.2 are obtained. | es |
dc.format | application/pdf | es |
dc.language.iso | eng | es |
dc.publisher | American Physical Society | es |
dc.relation.ispartof | Physical Review Letters, 96 (23), 236101-1-236101-4. | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.title | Influence of the angular distribution function of incident particles on the microstructure and anomalous scaling behavior of thin films | es |
dc.type | info:eu-repo/semantics/article | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/publishedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear | es |
dc.relation.publisherversion | https://doi.org/10.1103/PhysRevLett.96.236101 | es |
dc.identifier.doi | 10.1103/PhysRevLett.96.236101 | es |
idus.format.extent | 4 p. | es |
dc.journaltitle | Physical Review Letters | es |
dc.publication.volumen | 96 | es |
dc.publication.issue | 23 | es |
dc.publication.initialPage | 236101-1 | es |
dc.publication.endPage | 236101-4 | es |
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