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Structure of TiAlN reactive sputtered coatings
dc.creator | Denisov, V.N. | es |
dc.creator | Mavrin, B.B. | es |
dc.creator | Vinogradov, E.A. | es |
dc.creator | Polyakov, S.N. | es |
dc.creator | Kiricjenko, A.N. | es |
dc.creator | Gogolinsky, K.V. | es |
dc.creator | Useinov, A.S. | es |
dc.creator | Blank, V.D. | es |
dc.creator | Fortio Godinho, Vanda Cristina | es |
dc.creator | Philippon, D. | es |
dc.creator | Fernández Camacho, Asunción | es |
dc.date.accessioned | 2019-01-15T15:11:39Z | |
dc.date.available | 2019-01-15T15:11:39Z | |
dc.date.issued | 2012 | |
dc.identifier.citation | Denisov, V.N., Mavrin, B.B., Vinogradov, E.A., Polyakov, S.N., Kiricjenko, A.N., Gogolinsky, K.V.,...,Fernández Camacho, A. (2012). Structure of TiAlN reactive sputtered coatings. Journal of Nano- and Electronic Physics, 4, 01021-1-4. | |
dc.identifier.issn | 2077-6772 | es |
dc.identifier.uri | https://hdl.handle.net/11441/81584 | |
dc.description.abstract | The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N 2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm -1 or in the region of 830 - 850 cm -1 depending on the deposition parameters whereas it is not exceed 630 cm -1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiN x] with x = 5 and x = 4. The chains of polyhedra [TiN x] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N 2 gas. | es |
dc.format | application/pdf | es |
dc.language.iso | eng | es |
dc.publisher | Sumy State University | es |
dc.relation.ispartof | Journal of Nano- and Electronic Physics, 4, 01021-1-4. | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.subject | Coating | es |
dc.subject | Hardness | es |
dc.subject | Reactive Sputtering | es |
dc.subject | TiAlN | es |
dc.subject | X-Ray Diffraction | es |
dc.subject | Raman Spectroscopy | es |
dc.title | Structure of TiAlN reactive sputtered coatings | es |
dc.type | info:eu-repo/semantics/article | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/publishedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
idus.format.extent | 4 p. | es |
dc.journaltitle | Journal of Nano- and Electronic Physics | es |
dc.publication.volumen | 4 | es |
dc.publication.initialPage | 01021-1 | es |
dc.publication.endPage | 4 | es |
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Structure of TiAlN Reactive.pdf | 336.6Kb | ![]() | Ver/ | |