Transfer of Individual Micro- and Nanoparticles for High- Precision 3D Analysis Using 360° Electron Tomography

Abstract

A versatile approach is demonstrated, providing a general routine for an extensive and advanced 3D characterization of individually selected micro- and nanoparticles, enabling the combination of complementary and scale-bridging techniques. Quintessential to the method is the transfer of individual particles onto tailored tips using a conventional scanning electron microscope equipped with a suitable micromanipulator. The method enables a damage- and contamination-free preparation of freestanding particles. This is of significant importance for applications addressing the measurement of structural, physical, and chemical properties of specifically selected particles, such as 360° electron tomography, atom probe tomography, nano X-ray tomography, or optical near-field measurements. In this context, the method is demonstrated for 360° electron tomography of micro-/macroporous zeolite particles with sizes in the micrometer range and mesoporous alpha-hematite nanoparticles exhibiting sizes of 50–100 nm, including detailed pre- and postcharacterization on the nanoscale.