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Compositional characterization of SiC-SiO2 interfaces in MOSFETs

dc.creatorBeltrán, Ana M.es
dc.creatorSchamm-Chardon, Sylviees
dc.creatorMortet, Vincentes
dc.creatorBedel-Pereira, Elénaes
dc.creatorCristiano, Fuccioes
dc.creatorStrenger, C.es
dc.creatorBauer, A.J.es
dc.date.accessioned2018-01-22T11:09:45Z
dc.date.available2018-01-22T11:09:45Z
dc.date.issued2012
dc.identifier.citationBeltrán, A.M., Schamm-Chardon, S., Mortet, V., Bedel-Pereira, E., Cristiano, F., Strenger, C. y Bauer, A.J. (2012). Compositional characterization of SiC-SiO2 interfaces in MOSFETs. En 15Th European Microscopy Conference Manchester (Gran Bretaña): The Royal Microscopical Society.
dc.identifier.urihttps://hdl.handle.net/11441/69295
dc.description.abstractIn the context of the MobiSiC project (Mobility engineering for SiC devices) we study 4H-SiC MOSFETs with the aim to get more insight in the C distribution and nature across the SiC-SiO2 interface and to correlate the results with electron mobility measurements. Investigations are based on the combination of structural and compositional analyses carried out by high resolution transmission electron microscopy (HRTEM) and spatially resolved EELS.es
dc.formatapplication/pdfes
dc.language.isoenges
dc.publisherThe Royal Microscopical Societyes
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 Internacional*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subjectTransmission electron microscopyes
dc.subjectEELSes
dc.subjectMOSFETses
dc.titleCompositional characterization of SiC-SiO2 interfaces in MOSFETses
dc.typeinfo:eu-repo/semantics/conferenceObjectes
dcterms.identifierhttps://ror.org/03yxnpp24
dc.type.versioninfo:eu-repo/semantics/publishedVersiones
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.contributor.affiliationUniversidad de Sevilla. Departamento de Ingeniería y Ciencia de los Materiales y del Transportees
dc.relation.publisherversionhttp://www.emc2012.org.uk//documents/Abstracts/Abstracts/EMC2012_1005.pdfes
dc.contributor.groupUniversidad de Sevilla. TEP123: Metalurgia e Ingeniería de los Materialeses
idus.format.extent2 p.es
dc.eventtitle15Th European Microscopy Conferencees
dc.eventinstitutionManchester (Gran Bretaña)es
dc.identifier.sisius20453857es

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