dc.creator | El Beainou, Raya | es |
dc.creator | García Valenzuela, Aurelio | es |
dc.creator | Raschetti, Marina | es |
dc.creator | Cote, Jean Marc | es |
dc.creator | Álvarez Molina, Rafael | es |
dc.creator | Palmero Acebedo, Alberto | es |
dc.creator | Potin, Valérie | es |
dc.creator | Martin, Nicolas | es |
dc.date.accessioned | 2024-06-18T08:21:54Z | |
dc.date.available | 2024-06-18T08:21:54Z | |
dc.date.issued | 2020-04-01 | |
dc.identifier.citation | El Beainou, R., García Valenzuela, A., Raschetti, M., Cote, J.M., Álvarez Molina, R., Palmero Acebedo, A.,...,Martin, N. (2020). A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films. Materials Letters, 264, Article number 127381. https://doi.org/10.1016/j.matlet.2020.127381. | |
dc.identifier.issn | 0167 - 577X | es |
dc.identifier.uri | https://hdl.handle.net/11441/160599 | |
dc.description.abstract | We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80° and a sputtering pressure of 0.25 Pa. Inclined columns (β = 38 ± 2°) are produced and the microstructure is observed by scanning electron microscopy. A 4-view imaging is performed in order to show inhomogeneous growing evolutions in the columns. Morphological features vs. viewing direction are also investigated from a growth simulation of these tilted W columns. Experimental and theoretical approaches are successfully compared and allow understanding how the direction of the W particle flux leads to dense or fibrous morphologies, as the column apexes are in front of the flux or in the shadowing zone. | es |
dc.format | application/pdf | es |
dc.format.extent | 4 p. | es |
dc.language.iso | eng | es |
dc.publisher | Elsevier B.V. | es |
dc.relation.ispartof | Materials Letters, 264, Article number 127381. | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.subject | Oblique angle deposition | es |
dc.subject | W thin films | es |
dc.subject | Tilted columns | es |
dc.subject | Dense | es |
dc.subject | Fibrous morphology | es |
dc.title | A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films | es |
dc.type | info:eu-repo/semantics/article | es |
dc.type.version | info:eu-repo/semantics/submittedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Física Aplicada I | |
dc.relation.publisherversion | https://www.sciencedirect.com/science/article/abs/pii/S0167577X20300860 | es |
dc.identifier.doi | 10.1016/j.matlet.2020.127381 | es |
dc.journaltitle | Materials Letters | es |
dc.publication.volumen | 264 | es |
dc.publication.initialPage | Article number 127381 | es |