Article
A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films
Author/s | El Beainou, Raya
García Valenzuela, Aurelio Raschetti, Marina Cote, Jean Marc Álvarez Molina, Rafael ![]() ![]() ![]() ![]() ![]() ![]() ![]() Palmero Acebedo, Alberto Potin, Valérie Martin, Nicolas |
Department | Universidad de Sevilla. Departamento de Física Aplicada I |
Publication Date | 2020-04-01 |
Deposit Date | 2024-06-18 |
Published in |
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Abstract | We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80° and ... We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80° and a sputtering pressure of 0.25 Pa. Inclined columns (β = 38 ± 2°) are produced and the microstructure is observed by scanning electron microscopy. A 4-view imaging is performed in order to show inhomogeneous growing evolutions in the columns. Morphological features vs. viewing direction are also investigated from a growth simulation of these tilted W columns. Experimental and theoretical approaches are successfully compared and allow understanding how the direction of the W particle flux leads to dense or fibrous morphologies, as the column apexes are in front of the flux or in the shadowing zone. |
Citation | El Beainou, R., García Valenzuela, A., Raschetti, M., Cote, J.M., Álvarez Molina, R., Palmero Acebedo, A.,...,Martin, N. (2020). A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films. Materials Letters, 264, Article number 127381. https://doi.org/10.1016/j.matlet.2020.127381. |
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