Artículo
A Rad-hard On-chip CMOS Charge Detector with High Dynamic Range
Autor/es | Saenz-Noval, Jorge J.
Leñero Bardallo, Juan Antonio Carmona Galán, Ricardo Gontard, Lionel C. |
Departamento | Universidad de Sevilla. Departamento de Electrónica y Electromagnetismo |
Fecha de publicación | 2023 |
Fecha de depósito | 2023-11-15 |
Publicado en |
|
Resumen | This article introduces a CMOS charge detector tailored for measuring ionizing radiation in a wide range of fluences. It represents an entirely on-chip solution based on capacitive sensing. It was fabricated using a standard ... This article introduces a CMOS charge detector tailored for measuring ionizing radiation in a wide range of fluences. It represents an entirely on-chip solution based on capacitive sensing. It was fabricated using a standard 0.18 μm CMOS process and employs Metal-insulator-Metal (MiM) capacitor arrays to attain high matching, low leakage, and minimal process variations. The sensing area was radhardened with a post-CMOS layer of metal deposited with a Focus Ion Beam (FIB) that removes the use of external metallic plates. Experimental testing under the electron beam of a scanning electron microscope (SEM) demonstrated radiation hardness at energies up to 10 keV, with a very high dynamic range of up to 138 dB (externally adjustable), and with a sensitivity of 1.43 μV/e-. By harnessing the detection of relative charge variations instead of relying on absolute values, this approach proves highly suitable for particle event detection and facilitates future integrations compatible with the Address Event Representation (AER) communication protocol. |
Agencias financiadoras | Ministerio de Ciencia, Innovación y Universidades (MICINN). España |
Identificador del proyecto | PGC2018-101538-A-I00
PID2021-128009OBC31 VERSO AT21_00096 P20_01206 |
Cita | Saenz-Noval, J.J., Leñero Bardallo, J.A., Carmona Galán, R. y Gontard, L.C. (2023). A Rad-hard On-chip CMOS Charge Detector with High Dynamic Range. IEEE Sensors Journal, 23 (21), 25971. https://doi.org/10.1109/JSEN.2023.3315357. |
Ficheros | Tamaño | Formato | Ver | Descripción |
---|---|---|---|---|
A Rad-hard.pdf | 4.317Mb | [PDF] | Ver/ | |