dc.creator | Wenisch, Robert | es |
dc.creator | Lungwitz, Frank | es |
dc.creator | Hanf, Daniel | es |
dc.creator | Heller, René | es |
dc.creator | Zscharschuch, Jens | es |
dc.creator | Hübner, René | es |
dc.creator | Borany, Johannes von | es |
dc.creator | Abrasonis, Gintautas | es |
dc.creator | Gemming, Sibylle | es |
dc.creator | Escobar-Galindo, Ramón | es |
dc.creator | Krause, Matthias | es |
dc.date.accessioned | 2023-06-09T10:26:12Z | |
dc.date.available | 2023-06-09T10:26:12Z | |
dc.date.issued | 2018-05-31 | |
dc.identifier.citation | Wenisch, R., Lungwitz, F., Hanf, D., Heller, R., Zscharschuch, J., Hübner, R.,...,Krause, M. (2018). Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures. Analytical Chemistry, 90 (13), 7837-7842. https://doi.org/10.1021/acs.analchem.8b00923. | |
dc.identifier.issn | 0003-2700 (impreso) | es |
dc.identifier.issn | 1520-6882 (online) | es |
dc.identifier.uri | https://hdl.handle.net/11441/147033 | |
dc.description.abstract | A new cluster tool for in situ real-time processing and depth-resolved compositional, structural and optical characterization of thin films at temperatures from −100 to 800 °C is described. The implemented techniques comprise magnetron sputtering, ion irradiation, Rutherford backscattering spectrometry, Raman spectroscopy, and spectroscopic ellipsometry. The capability of the cluster tool is demonstrated for a layer stack MgO/amorphous Si (∼60 nm)/Ag (∼30 nm), deposited at room temperature and crystallized with partial layer exchange by heating up to 650 °C. Its initial and final composition, stacking order, and structure were monitored in situ in real time and a reaction progress was defined as a function of time and temperature. | es |
dc.format | application/pdf | es |
dc.format.extent | 6 | es |
dc.language.iso | eng | es |
dc.publisher | American Chemical Society | es |
dc.relation.ispartof | Analytical Chemistry, 90 (13), 7837-7842. | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.title | Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures | es |
dc.type | info:eu-repo/semantics/article | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/publishedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Física Aplicada I | es |
dc.relation.publisherversion | https://pubs.acs.org/doi/10.1021/acs.analchem.8b00923# | es |
dc.identifier.doi | 10.1021/acs.analchem.8b00923 | es |
dc.journaltitle | Analytical Chemistry | es |
dc.publication.volumen | 90 | es |
dc.publication.issue | 13 | es |
dc.publication.initialPage | 7837 | es |
dc.publication.endPage | 7842 | es |