Browsing Ingeniería y Ciencia de los Materiales y del Transporte by Subject "Thermal stability for He release"
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Article
Microstructural characterization and thermal stability of He charged amorphous silicon films prepared by magnetron sputtering in helium
(Elsevier, 2023-06)Sputtering of silicon in a Helium magnetron discharge has been reported as a bottom-up procedure to obtain amorphous Si ...