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Browsing by Author "Zscharschuch, Jens"
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Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures
Wenisch, Robert; Lungwitz, Frank; Hanf, Daniel; Heller, René; Zscharschuch, Jens; Hübner, René; Borany, Johannes von; Abrasonis, Gintautas; Gemming, Sibylle; Escobar-Galindo, Ramón; Krause, Matthias (American Chemical Society, 2018-05-31)A new cluster tool for in situ real-time processing and depth-resolved compositional, structural and optical characterization ...