Repositorio de producción científica de la Universidad de Sevilla

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

 

Advanced Search
 
Opened Access Perspectives on oblique angle deposition of thin films: From fundamentals to devices
Cites

Show item statistics
Icon
Export to
Author: Barranco Quero, Ángel
Borrás Martos, Ana Isabel
Rodríguez González-Elipe, Agustín
Palmero Acebedo, Alberto
Department: Universidad de Sevilla. Departamento de Química Inorgánica
Date: 2016
Published in: Progress in Materials Science, 76, 59-152.
Document type: Article
Abstract: The oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostr...
[See more]
Cite: Barranco Quero, Á., Borrás Martos, A.I., Rodríguez González-Elipe, A. y Palmero Acebedo, A. (2016). Perspectives on oblique angle deposition of thin films: From fundamentals to devices. Progress in Materials Science, 76, 59-152.
Size: 11.87Mb
Format: PDF

URI: https://hdl.handle.net/11441/83885

DOI: 10.1016/j.pmatsci.2015.06.003

See editor´s version

This work is under a Creative Commons License: 
Attribution-NonCommercial-NoDerivatives 4.0 Internacional

This item appears in the following Collection(s)