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STEM–EELS analysis reveals stable high-density He in nanopores of amorphous silicon coatings deposited by magnetron sputtering

 

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Opened Access STEM–EELS analysis reveals stable high-density He in nanopores of amorphous silicon coatings deposited by magnetron sputtering
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Author: Schierholz, Roland
Lacroix, Bertrand
Fortio Godinho, Vanda Cristina
Caballero Hernández, Jaime
Duchamp, Martial
Fernández Camacho, Asunción
Date: 2015
Published in: Nanotechnology, 26 (7), 07503-.
Document type: Article
Abstract: A broad interest has been showed recently on the study of nanostructuring of thin films and surfaces obtained by low‐energy He plasma treatments and He incorporation via magnetron sputtering. In this paper spatially resolved electron energy‐loss spe...
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Cite: Schierholz, R., Lacroix, B., Fortio Godinho, V.C., Caballero Hernández, J., Duchamp, M. y Fernández Camacho, A. (2015). STEM–EELS analysis reveals stable high-density He in nanopores of amorphous silicon coatings deposited by magnetron sputtering. Nanotechnology, 26 (7), 07503-.
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URI: https://hdl.handle.net/11441/80948

DOI: 10.1088/0957-4484/26/7/075703

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