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On the microstructure of thin films grown by an isotropically directed deposition flux

 

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Opened Access On the microstructure of thin films grown by an isotropically directed deposition flux
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Author: Álvarez Molina, Rafael
Romero Gómez, Pablo
Gil Rostra, Jorge
Cotrino Bautista, José
Yubero Valencia, Francisco
Palmero Acebedo, Alberto
Rodríguez González-Elipe, Agustín
Department: Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear
Date: 2010
Published in: Journal of Applied Physics, 108, 06431-.
Document type: Article
Abstract: The influence of isotropically directed deposition flux on the formation of the thin film microstructure at low temperatures is studied. For this purpose we have deposited TiO2 thin films by two different deposition techniques: reactive magnetron sp...
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Cite: Álvarez Molina, R., Romero Gómez, P., Gil Rostra, J., Cotrino Bautista, J., Yubero Valencia, F., Palmero Acebedo, A. y Rodríguez González-Elipe, A. (2010). On the microstructure of thin films grown by an isotropically directed deposition flux. Journal of Applied Physics, 108, 06431-.
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URI: https://hdl.handle.net/11441/71512

DOI: 10.1063/1.3483242

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