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Nanocolumnar growth of thin films deposited at oblique angles: Beyond the tangent rule

 

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Opened Access Nanocolumnar growth of thin films deposited at oblique angles: Beyond the tangent rule
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Author: Álvarez Molina, Rafael
López Santos, Carmen
Parra Barranco, Julián
Rico Gavira, Víctor Joaquín
Barranco Quero, Ángel
Cotrino Bautista, José
Rodríguez González-Elipe, Agustín
Palmero Acebedo, Alberto
Date: 2014
Published in: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 32
Document type: Article
Abstract: The growth of nanostructured physical vapor deposited thin films at oblique angles is becoming a hot topic for the development of a large variety of applications. Up to now, empirical relations, such as the so-called tangent rule, have been uncritic...
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Cite: Álvarez Molina, R., López Santos, C., Parra Barranco, J., Rico Gavira, V.J., Barranco Quero, Á., Cotrino Bautista, J.,...,Palmero Acebedo, A. (2014). Nanocolumnar growth of thin films deposited at oblique angles: Beyond the tangent rule. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 32
Size: 496.1Kb
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URI: https://hdl.handle.net/11441/69261

DOI: 10.1116/1.4882877

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