A simplified hydrokinetic model for a steady‐state microwave discharge sustained by traveling waves at atmospheric pressure conditions

Abstract

The properties of a microwave‐induced argon plasma produced by traveling surface wave at atmospheric pressure are investigated theoretically. A hydrokinetic model is elaborated to obtain the nonequilibrium one‐dimensional profiles of electron temperature Te (average electron energy), electron density ne, and the first excited state population density n4s, along the axis of a steady‐state discharge. A three‐level atomic structure is assumed for the argon atom. A particle balance is included through the continuity equations for ne and n4s. These equations are coupled with an energy balance equation for the electrons. The effects of different parameters on the properties of the argon discharge are investigated: discharge tube radius, gas flow rate, resonant radiation‐escape factor, and neutral gas temperature.