Artículo
Colored semi-transparent Cu-Si oxide thin films prepared by magnetron sputtering
Autor/es | Gil Rostra, Jorge
Yubero Valencia, Francisco Fernández, R. Cotrino Bautista, José Ortega Feliú, I. Rodríguez González-Elipe, Agustín |
Departamento | Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear |
Fecha de publicación | 2011 |
Fecha de depósito | 2019-02-13 |
Publicado en |
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Resumen | Colored semi-transparent Cu-Si oxide thin films have been prepared by reactive magnetron sputtering from a single cathode of copper-silicon composition. Thin films of different composition and optical response were obtained ... Colored semi-transparent Cu-Si oxide thin films have been prepared by reactive magnetron sputtering from a single cathode of copper-silicon composition. Thin films of different composition and optical response were obtained by changing process parameters like the relative amount of copper in the target and the O2/Ar mixture of the reactive plasma gas. The film characteristics were analyzed by several techniques. Their optical properties (refractive index, absorption coefficient, color) have been correlated with the process parameters used in the film preparation as well as with the film stoichiometry and chemistry. |
Agencias financiadoras | Ministerio de Ciencia e Innovación (MICIN). España Junta de Andalucía |
Identificador del proyecto | CEN-20072014
MAT2010-18447 MAT2010-21228 CSD2008–00023 P09-TEP5283 CTS-5189 |
Cita | Gil Rostra, J., Yubero Valencia, F., Fernández, R., Cotrino Bautista, J., Ortega Feliú, I. y Rodríguez González-Elipe, A. (2011). Colored semi-transparent Cu-Si oxide thin films prepared by magnetron sputtering. Optical Materials Express, 1 (6), 1100-1112. |
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Colored semi-transparent.pdf | 1.066Mb | [PDF] | Ver/ | |