Magnetron sputtered a-SiOxNy thin films: A closed porous nanostructure with controlled optical and mechanical properties

Abstract

were prepared by magnetron sputtering. Pores size, shape and distribution were evaluated by scanning electron microscopy and transmission electron microscopy. Raman and EELS analysis proved that the pores are filled with molecular nitrogen trapped during deposition. The mechanical properties evaluated by nanoindentation shows that the presence of closed nano-porosity does not compromise the mechanical integrity of these coatings. The introduction of closed porosity is shown as a good strategy for obtaining lower dielectric Amorphous silicon oxynitride coatings with similar composition and different closed porosity constant silicon oxynitride coatings with similar composition while keeping the good mechanical properties (∼13 GPa) characteristic of this type of coatings. The presence of close porosity gives also a good stability of coatings properties as compared to open porosity microstructures where gas phase in contact with the coatings can affect coatings properties.