dc.creator | Álvarez Molina, Rafael | es |
dc.creator | González García, Lola | es |
dc.creator | Romero Gómez, Pablo | es |
dc.creator | Rico-Gavira, Víctor Joaquín | es |
dc.creator | Cotrino Bautista, José | es |
dc.creator | Rodríguez González-Elipe, Agustín | es |
dc.creator | Palmero Acebedo, Alberto | es |
dc.date.accessioned | 2017-12-27T16:54:31Z | |
dc.date.available | 2017-12-27T16:54:31Z | |
dc.date.issued | 2011 | |
dc.identifier.citation | Álvarez Molina, R., González García, L., Romero Gómez, P., Rico-Gavira, V.J., Cotrino Bautista, J., Rodríguez González-Elipe, A. y Palmero Acebedo, A. (2011). Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles. Journal of Physics D - Applied Physics, 44, 385302-385308. | |
dc.identifier.issn | 0022-3727 (impreso) | es |
dc.identifier.uri | http://hdl.handle.net/11441/68024 | |
dc.description.abstract | The microstructural features of amorphous TiO2 thin films grown by the electron beam physical vapour deposition technique at oblique angles have
been experimentally and theoretically studied. The microstructural features of the deposited films were characterized by considering both, the column
tilt angle and the increase of the column thickness with height. A Monte Carlo
model of the film growth has been developed that takes into account surface
shadowing, short-range interaction between the deposition species and the
film surface, as well as the angular broadening of the deposition flux when arriving at the substrate. The good match between simulations and experimental results indicates the importance of these factors in the growth and microstructural development of thin films deposited at oblique angles. | es |
dc.description.sponsorship | Ministerio de Innovación, MAT 2007-65764, CONSOLIDER INGENIO 2010-CSD2008-00023, PIE 200960I132 | es |
dc.description.sponsorship | Junta de Andalucía TEP2275, TEP5283, P07-FQM-03298, FQM-6900 | es |
dc.format | application/pdf | es |
dc.language.iso | eng | es |
dc.publisher | Institute of Physics Publishing | es |
dc.relation.ispartof | Journal of Physics D - Applied Physics, 44, 385302-385308. | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.title | Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles | es |
dc.type | info:eu-repo/semantics/article | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/acceptedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Química Inorgánica | es |
dc.relation.projectID | 2007-65764 | es |
dc.relation.projectID | 2010-CSD2008-00023 | es |
dc.relation.projectID | 200960I132 | es |
dc.relation.projectID | TEP2275 | es |
dc.relation.projectID | TEP5283 | es |
dc.relation.projectID | P07-FQM-03298 | es |
dc.relation.projectID | FQM-6900 | es |
dc.relation.publisherversion | http://dx.doi.org/10.1088/0022-3727/44/38/385302 | es |
dc.identifier.doi | 10.1088/0022-3727/44/38/385302 | es |
idus.format.extent | 19 p. | es |
dc.journaltitle | Journal of Physics D - Applied Physics | es |
dc.publication.volumen | 44 | es |
dc.publication.initialPage | 385302 | es |
dc.publication.endPage | 385308 | es |
dc.identifier.sisius | 20093653 | es |
dc.contributor.funder | European Union (UE) | |
dc.contributor.funder | Junta de Andalucía | |