Artículo
2D compositional self-patterning in magnetron sputtered thin films
Autor/es | García Valenzuela, Aurelio
Álvarez Molina, Rafael Rico, Víctor Espinos, Juan P. López Santos, Carmen Solís, Javier Siegel, Jan del Campo, Adolfo Palmero Acebedo, Alberto González Elipe, Agustín Rodríguez |
Departamento | Universidad de Sevilla. Departamento de Física Aplicada I |
Fecha de publicación | 2019-06-30 |
Fecha de depósito | 2024-06-19 |
Publicado en |
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Resumen | Unlike topography patterning, widely used for numerous applications and produced by means of different technologies, there are no simple procedures to achieve surface compositional patterning at nanometric scales. In this ... Unlike topography patterning, widely used for numerous applications and produced by means of different technologies, there are no simple procedures to achieve surface compositional patterning at nanometric scales. In this work we have developed a simple method for 2D patterning the composition of thin films. The method relies on the magnetron sputtering deposition at oblique angles onto patterned substrates made by laser induced periodic surface structures (LIPSS). The method feasibility has been demonstrated by depositing SiOx thin films onto LIPSS structures generated in Cr layers. A heterogeneous and aligned distribution of O/Si ratios (and different Si n+ chemical states) along the LIPSS structure in length scales of some hundreds nm's has been proven by angle resolved X-ray photoelectron spectroscopy and a patterned arrangement of composition monitored by atomic force microscopy-Raman analysis. The obtained results are explained by the predictions of a Monte Carlo simulation of this deposition process and open the way for the tailored one-step fabrication of surface devices with patterned compositions. |
Agencias financiadoras | European Commission (EC). Fondo Europeo de Desarrollo Regional (FEDER) Ministerio de Economia, Industria y Competitividad (MINEICO). España Universidad de Sevilla |
Identificador del proyecto | 201560E055
MAT2016- 79866-R TEC2017-82464-R MAT2015-69035- REDC |
Cita | García Valenzuela, A., Álvarez Molina, R., Rico, V., Espinos, J.P., López Santos, C., Solís, J.,...,González Elipe, A.R. (2019). 2D compositional self-patterning in magnetron sputtered thin films. Applied Surface Science, 480, 115-121. https://doi.org/10.1016/j.apsusc.2019.02.206. |
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