Artículo
Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
Autor/es | García Valenzuela, Aurelio
Butterling, Maik Liedke, Maciej Oskar Hirschmann, Eric Trinh, Thu Trang Attallah, Ahmed G. Wagner, Andreas Álvarez Molina, Rafael Gil Rostra, Jorge Rico, Víctor Palmero Acebedo, Alberto González Elipe, Agustín Rodríguez |
Departamento | Universidad de Sevilla. Departamento de Física Aplicada I |
Fecha de publicación | 2020-03-15 |
Fecha de depósito | 2024-06-18 |
Publicado en |
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Resumen | The nano-porosity embedded into the tilted and separated nanocolumns characteristic of the microstructure of evaporated thin films at oblique angles has been critically assessed by various variants of the positron annihilation ... The nano-porosity embedded into the tilted and separated nanocolumns characteristic of the microstructure of evaporated thin films at oblique angles has been critically assessed by various variants of the positron annihilation spectroscopy. This technique represents a powerful tool for the analysis of porosity, defects and internal interfaces of materials, and has been applied to different as-deposited SiO2 and TiO2 thin films as well as SiO2/TiO2 multilayers prepared by electron beam evaporation at 70° and 85° zenithal angles. It is shown that, under same deposition conditions, the concentration of internal nano-pores in SiO2 is higher than in TiO2 nanocolumns, while the situation is closer to this latter in TiO2/SiO2 multilayers. These features have been compared with the predictions of a Monte Carlo simulation of the film growth and explained by considering the influence of the chemical composition on the growth mechanism and, ultimately, on the structure of the films. |
Agencias financiadoras | European Commission (EC). Fondo Europeo de Desarrollo Regional (FEDER) Ministerio de Economia, Industria y Competitividad (MINECO). España Consejo Superior de Investigaciones Científicas (CSIC) |
Identificador del proyecto | MAT2016-79866-R
201560E055 201860E050 |
Cita | García Valenzuela, A., Butterling, M., Liedke, M.O., Hirschmann, E., Trinh, T.T., Attallah, A.G.,...,González Elipe, A.R. (2020). Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers. Microporous and Mesoporous Materials, 295, Article number 109968. https://doi.org/10.1016/j.micromeso.2019.109968. |
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