Artículo
Structure and Void Connectivity in Nanocolumnar Thin Films Grown by Magnetron Sputtering at Oblique Angles
Autor/es | Álvarez Molina, Rafael
![]() ![]() ![]() ![]() ![]() ![]() ![]() Regodón Harkness, Guillermo Fernando Acosta Rivera, Hiedra Rico, Victor Alcala, Germán González Elipe, Agustín Rodríguez Palmero Acebedo, Alberto |
Departamento | Universidad de Sevilla. Departamento de Física Aplicada I |
Fecha de publicación | 2023-06 |
Fecha de depósito | 2024-06-17 |
Publicado en |
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Resumen | The morphology and void connectivity of thin films grown by a magnetron sputtering deposition technique at oblique geometries were studied in this paper. A well-tested thin film growth model was employed to assess the ... The morphology and void connectivity of thin films grown by a magnetron sputtering deposition technique at oblique geometries were studied in this paper. A well-tested thin film growth model was employed to assess the features of these layers along with experimental data taken from the literature. A strong variation in the film morphology and pore topology was found as a function of the growth conditions, which have been linked to the different collisional transport of sputtered species in the plasma gas. Four different characteristic film morphologies were identified, such as (i) highly dense and compact, (ii) compact with large, tilted mesopores, (iii) nanocolumns separated by large mesopores, and (iv) vertically aligned sponge-like coalescent nanostructures. Attending to the topology and connectivity of the voids in the film, the nanocolumnar morphology was shown to present a high pore volume and area connected with the outside by means of mesopores, with a diameter above 2 nm, while the sponge-like nanostructure presented a high pore volume and area, as well as a dense network connectivity by means of micropores, with a diameter below 2 nm. The obtained results describe the different features of the porous network in these films and explain the different performances as gas or liquid sensors in electrochromic applications or for infiltration with nanoparticles or large molecules. |
Agencias financiadoras | European Commission (EC). Fondo Europeo de Desarrollo Regional (FEDER) Consejería de Transformación Económica, Industria, Conocimiento y Universidades (Junta de Andalucía) Consejería de Economía, Conocimiento, Empresas y Universidad (Junta de Andalucía) European Union (UE). H2020 |
Identificador del proyecto | PID2020-114270RA-I00
![]() PID2021-126524NB-I00 ![]() PID2021- 123879OB-C21 ![]() PID2020-112620GB-I00 ![]() TED2021-130124A-I00 ![]() US-1380977 ![]() US-1381045 ![]() P18- RT-3480 ![]() 899352 ![]() |
Cita | Álvarez Molina, R., Regodón Harkness, G.F., Acosta Rivera, H., Rico, V., Alcala, G., González Elipe, A.R. y Palmero Acebedo, A. (2023). Structure and Void Connectivity in Nanocolumnar Thin Films Grown by Magnetron Sputtering at Oblique Angles. Coatings, 13 (6), Article number 991. https://doi.org/10.3390/coatings13060991. |
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