Artículo
XRD and FTIR analysis of Ti–Si–C–ON coatings for biomedical applications
Autor/es | Oliveira, Cristina
Gonçalves, L. Almeida, Bernardo Gonçalves Macedo Tavares, Carlos José Carvalho, Sandra Vaz, Filipe Escobar-Galindo, Ramón Henriques, M. Susano, M. Oliveira, Rosário |
Departamento | Universidad de Sevilla. Departamento de Física Aplicada I |
Fecha de publicación | 2008-12-25 |
Fecha de depósito | 2023-06-26 |
Publicado en |
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Resumen | Ti–Si–C–ON films were deposited by DC reactive magnetron sputtering using different partial pressure ratio of oxygen (pO2) and nitrogen (pN2). Compositional analysis revealed the existence of three different growth zones ... Ti–Si–C–ON films were deposited by DC reactive magnetron sputtering using different partial pressure ratio of oxygen (pO2) and nitrogen (pN2). Compositional analysis revealed the existence of three different growth zones for the films; (I) N/Ti = 2.1 (high atomic ratio) and low oxygen content; (II) 0.76 < N/Ti < 2.1 (intermediate atomic ratio) and (III) N/Ti ≤ 0.12 (low ratio) and high oxygen content. For high N/Ti atomic ratio (N/Ti = 2.1) the XRD pattern exhibits reflections that correspond to a mixture of two different phases: a metallic-like Ti and a fcc NaCl type structure. Its electrical resistivity presents a metallic character and, consequently, has high infrared reflectivity. For the intermediate N/Ti ratio (0.76 < N/Ti < 2.1), the films crystallize in a B1-NaCl crystal structure typical for TiC0.2N0.8. Their FTIR spectra present C–N modes, besides the TiN ones, that indicate a progressive substitution of nitrogen by carbon atoms with increasing oxygen content (and lowering N/Ti ratio). For the highest oxygen content (and lower N/Ti ratio) the presence of the Ti–O–Ti stretching mode shows the formation of highly resistive Ti–O compounds consistent with the semiconductor character of this film. Biofilm formation as well as material cytotoxicity seemed to be related with the presence of the Ti. |
Cita | Oliveira, C., Gonçalves, L., Almeida, B.G., Macedo Tavares, C.J., Carvalho, S., Vaz, F.,...,Oliveira, R. (2008). XRD and FTIR analysis of Ti–Si–C–ON coatings for biomedical applications. Surface and Coatings Technology, 203 (5-7), 490-494. https://doi.org/10.1016/j.surfcoat.2008.06.121. |
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