dc.creator | Jullien, M. | es |
dc.creator | Horwat, D. | es |
dc.creator | Endrino, José Luis | es |
dc.creator | Escobar-Galindo, Ramón | es |
dc.creator | Bauer, Ph. | es |
dc.creator | Pierson, J.F. | es |
dc.date.accessioned | 2023-06-23T09:54:35Z | |
dc.date.available | 2023-06-23T09:54:35Z | |
dc.date.issued | 2010 | |
dc.identifier.citation | Jullien, M., Horwat, D., Endrino, J.L., Escobar-Galindo, R., Bauer, P. y Pierson, J.F. (2010). Impact of the particles impingement on the electronic conductivity of Al doped ZnO films grown by reactive magnetron sputtering. En Innovations in Thin Film Processing and Characterisation (ITFPC 2009) Nancy, Francia: IOP Science. | |
dc.identifier.issn | 1757-899X | es |
dc.identifier.uri | https://hdl.handle.net/11441/147435 | |
dc.description.abstract | Aluminium doped zinc oxide thin films (4 at.% Al) were deposited by reactive magnetron sputtering technique and characterized by X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS), four point probe technique and optical spectrophotometry. High heterogeneities were observed as a function of sample position in the chamber. The chemical analyses did not reveal significant change in composition. Optical investigation showed a strong variation of the density of free carriers, through the Burstein-Moss effect, suggesting that Al dopants were partially inactivated. | es |
dc.description.sponsorship | Ministerio de Educación y Ciencia CSD2008-00023 (Consolider) | es |
dc.format | application/pdf | es |
dc.format.extent | 4 | es |
dc.language.iso | eng | es |
dc.publisher | IOP Science | es |
dc.relation.ispartof | Innovations in Thin Film Processing and Characterisation (ITFPC 2009) (2010). | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.title | Impact of the particles impingement on the electronic conductivity of Al doped ZnO films grown by reactive magnetron sputtering | es |
dc.type | info:eu-repo/semantics/conferenceObject | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/publishedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Física Aplicada I | es |
dc.relation.projectID | CSD2008-00023 (Consolider) | es |
dc.relation.publisherversion | https://iopscience.iop.org/article/10.1088/1757-899X/12/1/012006 | es |
dc.identifier.doi | 10.1088/1757-899X/12/1/012006 | es |
dc.eventtitle | Innovations in Thin Film Processing and Characterisation (ITFPC 2009) | es |
dc.eventinstitution | Nancy, Francia | es |
dc.contributor.funder | Ministerio de Educación y Ciencia (MEC). España | es |