ListarIngeniería y Ciencia de los Materiales y del Transporte por materia "Vertical interconnect"
Mostrando ítems 1-1 de 1
-
Ponencia
Preliminary experiments for the fabrication of thermally actuated bimorph cantilever arrays on non-silicon wafers with vertical interconnects
(4M Network of Excellence, 2007)This paper describes the first steps for the fabrication of low-cost cantilever arrays, developed at RAL, on non-silicon polymer ...