dc.creator | Guillén Rodríguez, Elena | es |
dc.creator | Krause, Matthias | es |
dc.creator | Heras Pérez, Irene | es |
dc.creator | Rincón-Llorente, Gonzalo | es |
dc.creator | Escobar-Galindo, Ramón | es |
dc.date.accessioned | 2021-06-16T11:33:05Z | |
dc.date.available | 2021-06-16T11:33:05Z | |
dc.date.issued | 2021-02 | |
dc.identifier.citation | Guillén Rodríguez, E., Krause, M., Heras Pérez, I., Rincón-Llorente, G. y Escobar-Galindo, R. (2021). Tailoring Crystalline Structure of Titanium Oxide Films for Optical Applications Using Non-Biased Filtered Cathodic Vacuum Arc Deposition at Room Temperature. Coatings, 11 (2), 233-. | |
dc.identifier.issn | 2079-6412 | es |
dc.identifier.uri | https://hdl.handle.net/11441/111851 | |
dc.description.abstract | Titanium oxide films were deposited at room temperature and with no applied bias using
a filtered cathodic vacuum arc (FCVA) system in a reactive oxygen environment. The dependence
of film growth on two process parameters, the working pressure (Pw) and the O2 partial pressure
(pO2), is described in detail. The composition, morphological features, crystalline structure, and
optical properties of the deposited films were systematically studied by Rutherford Back Scattering
(RBS), Scanning Electron Microscopy (SEM), X-Ray diffraction (XRD), Raman Spectroscopy, UV-vis
spectroscopy, and spectroscopic ellipsometry. This systematic investigation allowed the identification
of three different groups or growth regimes according to the stoichiometry and the phase
structure of the titanium oxide films. RBS analysis revealed that a wide range of TiOx stoichiometries
(0.6 < < 2.2) were obtained, including oxygen-deficient, stoichiometric TiO2 and oxygen-rich
films. TiO, Ti2O3, rutile-type TiO2, and amorphous TiO2 phase structures could be achieved, as
confirmed both by Raman and XRD. Therefore, the results showed a highly versatile approach, in
which different titanium oxide stoichiometries and crystalline phases especially suited for diverse
optical applications can be obtained by changing only two process parameters, in a process at room
temperature and without applied bias. Of particular interest are crystalline rutile films with high
density to be used in ultra-high reflectance metal-dielectric multilayered mirrors, and reduced-TiO2
rutile samples with absorption in the visible range as a very promising photocatalyst material. | es |
dc.description.sponsorship | H2020 RISE project “Framework of Innovation for Engineering of New Durable Solar Surfaces FRIENDS2, GA-645725 | es |
dc.format | application/pdf | es |
dc.format.extent | 16 p. | es |
dc.language.iso | eng | es |
dc.publisher | MDPI | es |
dc.relation.ispartof | Coatings, 11 (2), 233-. | |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internacional | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | * |
dc.subject | Titanium oxide films | es |
dc.subject | Filtered cathodic vacuum arc | es |
dc.subject | Rutile | es |
dc.subject | Optical coatings | es |
dc.title | Tailoring Crystalline Structure of Titanium Oxide Films for Optical Applications Using Non-Biased Filtered Cathodic Vacuum Arc Deposition at Room Temperature | es |
dc.type | info:eu-repo/semantics/article | es |
dcterms.identifier | https://ror.org/03yxnpp24 | |
dc.type.version | info:eu-repo/semantics/publishedVersion | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.contributor.affiliation | Universidad de Sevilla. Departamento de Física Aplicada I | es |
dc.relation.projectID | FRIENDS2, GA-645725 | es |
dc.identifier.doi | 10.3390/coatings11020233 | es |
dc.contributor.group | Universidad de Sevilla. TEP-946 Materiales y Nanotecnología para la Innovación | es |
idus.validador.nota | This article belongs to the Special Issue Micro-Nano Surface Functionalization of Materials and Thin Films for Optical Applications | es |
dc.journaltitle | Coatings | es |
dc.publication.volumen | 11 | es |
dc.publication.issue | 2 | es |
dc.publication.initialPage | 233 | es |