Browsing Artículos (Física Aplicada I) by Subject "Secondary ion mass spectroscopy"
Now showing items 1-1 of 1
-
Article
Comparative depth-profiling analysis of nanometer-metal multilayers by ion-probing techniques
(ScienceDirect, 2009-04)We examine here the depth resolution (interface width) in elemental analysis and depth profiling of complex layer systems ...