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Browsing by Author "Thomann, Anne Lise"
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Microstructural characterization and thermal stability of He charged amorphous silicon films prepared by magnetron sputtering in helium
Fernández Camacho, Asunción; Sauvage, Thierry; Diallo, Babacar; Hufschmidt, Dirk; Jiménez de Haro, María del Carmen; Montes Amorín, Olga; Martínez Blanes, José María; Caballero Hernández, Jaime; Fortio Godinho, Vanda Cristina; Ferrer Fernández, Francisco Javier; Ibrahim, Sara; Brault, Pascal; Thomann, Anne Lise (Elsevier, 2023-06)Sputtering of silicon in a Helium magnetron discharge has been reported as a bottom-up procedure to obtain amorphous Si ...