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Artículo
Electronic structure of stoichiometric and Ar+-bombarded ZrO2 determined by resonant photoemission
(American Institute of Physics Publising LLC, 1995)
The electronic properties of thermally grown ZrO2 thin films before and after Ar+ bombardment have been studied with resonant photoemission spectroscopy using synchrotron radiation. For stoichiometric ZrO2 thin films the ...
Artículo
Room temperature synthesis of porous SiO2 thin films by plasma enhanced chemical vapor deposition
(AVS Science and Technology Society, 2004-07)
Synthesis of porous SiO2 thin films in room temperature was carried out using plasma enhanced chemical vapor deposition (CVD) in an electron cyclotron resonance microwave reactor with a downstream configuration.The gas ...