ListarFísica Atómica, Molecular y Nuclear por materia "Magnetron sputtering at oblique angle"
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Artículo
Plasmas and Acoustic Waves to Pattern the Nanostructure and Chemistry of Thin Films
(Acta Materialia Inc, 2023)In this work, piezoelectric AWs and plasmas have been brought together during the growth of a thin film as a novel methodology ...