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Coarse-grained approach to amorphous and anisotropic materials in kinetic Monte Carlo thin-film growth simulations: A case study of TiO₂ and ZnO by plasma-enhanced chemical vapor deposition
(Wiley, 2022-03)
The growth of TiO₂ and ZnO thin films is studied by means of coarse-grained kinetic Monte Carlo simulations under conditions typically encountered in plasma-enhanced chemical vapor deposition experiments. The basis of our ...