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Artículo
Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
(IOP Science, 2012-12-17)
In this work, we report the successful growth of ZnO nanostructured films by oblique angle magnetron sputtering deposition (OAD) from a Zn target in a mixture gas of Ar/O2. The film microstructure and the surface morphology ...