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Artículo
Optical refractive index and static permittivity of mixed Zr–Si oxide thin films prepared by ion beam induced CVD
(Elsevier, 2007)
Mixed oxides ZrxSi1−xO2 (0bxb1) thin films have been prepared at room temperature by decomposition of (CH3CH2O)3SiH and Zr[OC (CH3)3]4 volatile precursors induced by mixtures of O2 + and Ar+ ions. The films were flat and ...