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Artículo
An XPS and ellipsometry study of Cr–O–Al mixed oxides grown by reactive magnetron sputtering
(ScienceDirect, 2011-12-15)
Cr–O–Al thin film mixed oxides grown on Si (100) substrates by reactive magnetron sputtering using different target compositions from 90% Cr (10% Al) to 10% Cr (90% Al) and oxygen fluxes in the range from 0 to 15 sccm have ...