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Artículo
Control of the optical properties of silicon and chromium mixed oxides deposited by reactive magnetron sputtering
(ScienceDirect, 2011-03-31)
The development of mixed-oxide thin films allows obtaining materials with better properties than those of the different binary oxides, which makes them suitable for a great number of applications in different fields, such ...
Artículo
An XPS and ellipsometry study of Cr–O–Al mixed oxides grown by reactive magnetron sputtering
(ScienceDirect, 2011-12-15)
Cr–O–Al thin film mixed oxides grown on Si (100) substrates by reactive magnetron sputtering using different target compositions from 90% Cr (10% Al) to 10% Cr (90% Al) and oxygen fluxes in the range from 0 to 15 sccm have ...