idUS - Browsing by Subject "e-beam evaporation"

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Presentation

EFTEM studies on the localization of silicon nanocrystals embedded in SiO2 for nano-devices

Castro, Celia; Andreozzi, A.; Benassayag, G.; Beltrán, Ana M.; Seguini, G.; Perego, M.; Schamm-Chardon, Sylvie (The Royal Microscopical Society, 2012)

We investigated for the first time the capabilities of combining Si NCs fabrication methods like e-beam evaporation and ULE-IBS with block copolymers nanostructured masks.