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Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas
Rabbani, F.; Escobar-Galindo, Ramón; Arnoldbik, W.M.; Zwaag, S. van der; Veen, A. van; Schut, Henk (ScienceDirect, 2004-09)Intrinsic stress in amorphous hydrogenated carbon (a-C:H) coatings was reduced through addition of 10–20 sccm N2 to the ...