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Listar por autor "Muñoz Martín, Ángel"
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Nanometric resolution in glow discharge optical emission spectroscopy and Rutherford backscattering spectrometry depth profiling of metal (Cr, Al) nitride multilayers
Escobar-Galindo, Ramón; Gago, Raúl; Forniés, E.; Muñoz Martín, Ángel; Climent Font, Aurelio; Albella Martín, José María (ScienceDirect, 2006-05)In this work, we address the capability of glow discharge optical emission spectroscopy (GDOES) for fast and accurate depth ...