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A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films
El Beainou, Raya; García Valenzuela, Aurelio; Raschetti, Marina; Cote, Jean Marc; Álvarez Molina, Rafael; Palmero Acebedo, Alberto; Potin, Valérie; Martin, Nicolas (Elsevier B.V., 2020-04-01)We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. ...