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Electrical characteristics of mixed Zr–Si oxide thin films prepared by ion beam induced chemical vapor deposition at room temperature
Ferrer Troyano, Francisco Javier; Frutos Rayego, Fabián; García López, Francisco Javier; Jiménez, C.; Yubero Valencia, Francisco (Elsevier, 2009)Mixed Zr–Si oxide thin films have been prepared at room temperature by ion beam decomposition of organometallic volatile ...