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Relationship between scaling behavior and porosity of plasma-deposited TiO2 thin films
Borrás, A.; Yanguas Gil, Alejandro; Barranco Quero, Ángel; Cotrino Bautista, José; Rodríguez González-Elipe, Agustín (American Physical Society, 2007)The growth of TiO2 thin films prepared by plasma enhanced chemical vapor deposition has been studied by analyzing their ...