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Stoichiometric Control of SiOx Thin Films Grown by Reactive Magnetron Sputtering at Oblique Angles
García Valenzuela, Aurelio; Álvarez, Rafael; López Santos, Carmen; Ferrer, Francisco; Rico, Victor; Guillén Guillén, Elena; Alcón Camas, M.; Escobar-Galindo, Ramón; González Elipe, Agustín Rodríguez; Palmero Acebedo, Alberto (Wiley, 2016)The deposition of SiOx (x < 2) compound thin films by the reactive magnetron sputtering technique at oblique angles is ...