Artículo
Plasma Assisted Oblique Angle Deposition of Transparent and Conductive in-Plane Anisotropic ITO Thin Films
Autor/es | Parra Barranco, Julián
Sánchez Valencia, Juan Ramón Aparicio Rebollo, Francisco Javier Ferrer Fernández, Francisco Javier García García, Francisco Rico-Gavira, Víctor Joaquín López Santos, Carmen Borrás Martos, Ana Isabel Rodríguez González-Elipe, Agustín Barranco Quero, Ángel |
Fecha de publicación | 2017 |
Fecha de depósito | 2018-09-19 |
Publicado en |
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Resumen | Oblique angle deposition (OAD) is a powerful technique for the fabrication of porous nanostructured oxide thin films. OAD films typically present a columnar tilted nanostructure due to geometrical shadowing effects during ... Oblique angle deposition (OAD) is a powerful technique for the fabrication of porous nanostructured oxide thin films. OAD films typically present a columnar tilted nanostructure due to geometrical shadowing effects during the thin film growth. In this work, we study the fabrication of transparent and conducting indium tin oxide films (ITO) by OAD assisted by a microwave ECR plasma. The objective of assisting the deposition with a plasma discharge is to modify the growth mechanism of the OAD process introducing additional parameters to control the columnar microstructure, composition, porosity of the films. The results indicate the OAD ITO deposition assisted by the plasma discharge is a very effective process to develop in-plane structural anisotropy in the ITO nanocolumnar films what determines their electrical properties. |
Identificador del proyecto | MAT2016-79866-R
MAT2013-40852-R MAT2013-42900-P 201560E055 IJCI-2014-21226 661480 |
Cita | Parra Barranco, J., Sánchez Valencia, J.R., Aparicio Rebollo, F.J., Ferrer, F.J., García García, F., Rico Gavira, V.J.,...,Barranco Quero, Á. (2017). Plasma Assisted Oblique Angle Deposition of Transparent and Conductive in-Plane Anisotropic ITO Thin Films. ECS Transacctions, 77 (3), 9-15. |
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Plasma Assisted Oblique Angle.pdf | 434.1Kb | [PDF] | Ver/ | |