Article
On the microstructure of thin films grown by an isotropically directed deposition flux
Author/s | Álvarez Molina, Rafael
Romero Gómez, Pablo Gil Rostra, Jorge Cotrino Bautista, José Yubero Valencia, Francisco Palmero Acebedo, Alberto Rodríguez González-Elipe, Agustín |
Department | Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear |
Publication Date | 2010 |
Deposit Date | 2018-04-02 |
Published in |
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Abstract | The influence of isotropically directed deposition flux on the formation of the thin film microstructure at low temperatures is studied. For this purpose we have deposited TiO2 thin films by two different deposition ... The influence of isotropically directed deposition flux on the formation of the thin film microstructure at low temperatures is studied. For this purpose we have deposited TiO2 thin films by two different deposition techniques: reactive magnetron sputtering, in two different experimental configurations, and plasma enhanced chemical vapor deposition. The obtained results indicate that films grown under conditions where deposition particles do not possess a clear directionality, and in the absence of a relevant plasma/film interaction, present similar refractive indices no matter the deposition technique employed. The film morphology is also similar and consists of a granular surface topography and a columnarlike structure in the bulk whose diameter increases almost linearly with the film thickness. The deposition has been simulated by means of a Monte Carlo model, taking into account the main processes during growth. The agreement between simulations and experimental results indicates that the obtained microstructures are a consequence of the incorporation of low-energy, isotropically directed, deposition particles. |
Funding agencies | Ministerio de Ciencia e Innovación (MICIN). España Junta de Andalucía |
Project ID. | MAT 2007- 65764
2010-CSD2008-00023 PIE 200960I132 TEP2275 P07-FQM-03298 |
Citation | Álvarez Molina, R., Romero Gómez, P., Gil Rostra, J., Cotrino Bautista, J., Yubero Valencia, F., Palmero Acebedo, A. y Rodríguez González-Elipe, A. (2010). On the microstructure of thin films grown by an isotropically directed deposition flux. Journal of Applied Physics, 108, 06431-. |
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