Article
Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles
Author/s | Álvarez Molina, Rafael
González García, Lola Romero Gómez, Pablo Rico-Gavira, Víctor Joaquín Cotrino Bautista, José Rodríguez González-Elipe, Agustín Palmero Acebedo, Alberto |
Department | Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear Universidad de Sevilla. Departamento de Química Inorgánica |
Publication Date | 2011 |
Deposit Date | 2017-12-27 |
Published in |
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Abstract | The microstructural features of amorphous TiO2 thin films grown by the electron beam physical vapour deposition technique at oblique angles have
been experimentally and theoretically studied. The microstructural ... The microstructural features of amorphous TiO2 thin films grown by the electron beam physical vapour deposition technique at oblique angles have been experimentally and theoretically studied. The microstructural features of the deposited films were characterized by considering both, the column tilt angle and the increase of the column thickness with height. A Monte Carlo model of the film growth has been developed that takes into account surface shadowing, short-range interaction between the deposition species and the film surface, as well as the angular broadening of the deposition flux when arriving at the substrate. The good match between simulations and experimental results indicates the importance of these factors in the growth and microstructural development of thin films deposited at oblique angles. |
Funding agencies | European Union (UE) Junta de Andalucía |
Project ID. | 2007-65764
2010-CSD2008-00023 200960I132 TEP2275 TEP5283 P07-FQM-03298 FQM-6900 |
Citation | Álvarez Molina, R., González García, L., Romero Gómez, P., Rico-Gavira, V.J., Cotrino Bautista, J., Rodríguez González-Elipe, A. y Palmero Acebedo, A. (2011). Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles. Journal of Physics D - Applied Physics, 44, 385302-385308. |
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J. Phys. D Appl. Phys. 44 385302 ... | 1.025Mb | [PDF] | View/ | |