Artículo
Growth of nanocolumnar thin films on patterned substrates at oblique angles
Autor/es | García-Valenzuela, Aurelio
Muñoz-Piña, Sandra Alcalá Penadés, Germán Álvarez Molina, Rafael Lacroix, Bertrand Santos, Antonio J Cuevas-Maraver, Jesús Rico-Gavira, Víctor Joaquín Gago, Raúl Vázquez Burgos, Luis Cotrino Bautista, José Rodríguez González-Elipe, Agustín Palmero Acebedo, Alberto |
Departamento | Universidad de Sevilla. Departamento de Física Aplicada I Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear Universidad de Sevilla. Departamento de Química Inorgánica |
Fecha de publicación | 2019 |
Fecha de depósito | 2019-10-03 |
Publicado en |
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Resumen | The influence of one dimensional substrate patterns on the nanocolumnar growth of thin films deposited by magnetron sputtering at oblique angles is theoretically and experimentally studied. A well‐established growth model ... The influence of one dimensional substrate patterns on the nanocolumnar growth of thin films deposited by magnetron sputtering at oblique angles is theoretically and experimentally studied. A well‐established growth model has been used to study the interplay between the substrate topography and the thin film morphology. A critical thickness has been defined, below which the columnar growth is modulated by the substrate topography, while for thicknesses above, the impact of substrate features is progressively lost in two stages; first columns grown on taller features take over neighboring ones, and later the film morphology evolves independently of substrate features. These results have been experimentally tested by analyzing the nanocolumnar growth of SiO2 thin films on ion‐induced patterned substrates. |
Identificador del proyecto | V PPIUS
VI PPIT-US MAT2013-40852-R MAT2016- 79866-R MAT2015-69035-R MAT2015-69035-REDC MAT2017-85089-C2-1- R S2013/MIT-3029 IND2017/IND7668 |
Cita | García-Valenzuela, A., Muñoz-Piña, S., Alcalá Penadés, G., Álvarez Molina, R., Lacroix, B., Santos, A.J.,...,Palmero Acebedo, A. (2019). Growth of nanocolumnar thin films on patterned substrates at oblique angles. Plasma Processes and Polymers, 16 (2), 1800135-. |
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